Novel Miniaturized Anti-Spring MEMS Accelerometer with Enhanced Performance
Chinese Academy of SciencesIn a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized accelerometer that can boost sensitivity, reducing noise and bias instability while maintaining compact chip size. The innovation centers around a novel anti-spring mechanism featuring pre-shaped curved beams, which enables stiffness softening without requiring large bias forces or displacements.